3D Line Chromatic Confocal Sensor AS Series

3D Line Chromatic Confocal Sensor AS Series

Supplier
Atometrics
Category
Semiconductor Packaging Equipment
Origin
China

White light is dispersed into a spectrum of continuous wavelengths; each wavelength is focused at a specific position on the surface of the measured object, forming a vertical focal plane to acquire the object's 3D topography, texture features and spectral data.; 01 High precision, fast speed Sub-micron resolution, Z-axis repeatability 50nm; 02 Rich measurement functions, easy integration Rich 3D measurement functions, simple and highly compatible SDK interface; 03 Measurement unaffected by material and external environment Can measure almost all materials; direct measurement without any treatment of the object. Built-in measurement and inspection software; 04 One-time measurement of multi-layer transparent materials Based on chromatic confocal technology, one scan achieves multi-layer topography measurement.

Specification Snapshot
Resolution
Sub-micron level
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Overview

White light is dispersed into a spectrum of continuous wavelengths; each wavelength is focused at a specific position on the surface of the measured object, forming a vertical focal plane to acquire the object's 3D topography, texture features and spectral data.; 01 High precision, fast speed Sub-micron resolution, Z-axis repeatability 50nm; 02 Rich measurement functions, easy integration Rich 3D measurement functions, simple and highly compatible SDK interface; 03 Measurement unaffected by material and external environment Can measure almost all materials; direct measurement without any treatment of the object. Built-in measurement and inspection software; 04 One-time measurement of multi-layer transparent materials Based on chromatic confocal technology, one scan achieves multi-layer topography measurement.

Specifications

ParameterValue
Z Axis Repeatability50nm

Applications

Specular reflection, online high-precision 3D measurement, SDK integrable; application examples: height/height difference ceramic substrate-step difference vehicle camera-height difference; 3D dimensions phone screen edge-curvature PCB-gold dot inspection semiconductor chip; flatness PCB pads-height & flatness.

Key Features

and spectral data.; 01 High accuracy and speed: sub-micron resolution, 50 nm Z-axis repeatability; 02 Rich, easy-to-integrate measurement functions: rich 3D measurement functions with a simple, highly compatible SDK interface; 03 Measurement unaffected by material and external environment: can measure almost all materials and measure directly without any treatment of the object.

Datasheet

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Supplier Information

At
Atometrics
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Banshi Intelligent Technology (Shenzhen) Co., Ltd. (brand: Atometrics) was established in 2017, headquartered in Shenzhen. It is a national-level specialized and sophisticated 'Little Giant' enterprise and a high-tech enterprise, focusing on high-precision measuring instruments and semiconductor metrology and inspection equipment. The company has launched various high-precision measurement products such as white light interferometers, flash measuring instruments, super depth-of-field microscopes, laser sensors, spectral confocal sensors, wafer 3D metrology equipment, etc., which are widely used in semiconductors, aerospace, 3C electronics, 5G communication, new energy, biomedical and other fields. Major customers include Huawei HiSilicon, CATL, Chinese Academy of Sciences, and other well-known enterprises, committed to exploring the future of humanity with precision measurement.

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3D Line Chromatic Confocal Sensor AS Series
Atometrics · Semiconductor Packaging Equipment
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