Linear Positioning Stage
The ECO225LMS series economy direct drive stage uses non-contact linear motor direct drive, featuring extremely low cogging and smooth motion. It comes standard with a long-life rolling-friction bearing system and an integrated sealing protection design, with standard travels covering 200 mm-600 mm and maximum speeds up to 1500 mm/s. It delivers minimum incremental motion better than 50 nm and sub-micron bi-directional repeatability, combining high accuracy with low cost.
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Overview
The ECO225LMS series economy direct drive stage uses non-contact linear motor direct drive, featuring extremely low cogging and smooth motion. It comes standard with a long-life rolling-friction bearing system and an integrated sealing protection design, with standard travels covering 200 mm-600 mm and maximum speeds up to 1500 mm/s. It delivers minimum incremental motion better than 50 nm and sub-micron bi-directional repeatability, combining high accuracy with low cost.
Specifications
| Parameter | Value |
|---|---|
| Travel | 200/300/400/500/600mm |
| Min. Incremental Motion | 50nm |
| Bi-Directional Repeatability | <1μm |
| Yaw | 10 arc secarc sec |
| Maximum Force (Continuous) | 90 N |
| Maximum Speed | 1500mm/s |
| Maximum Acceleration | 2g |
| Moving Mass | 6.2 kg |
| Traceability For Calibration | ISO230-2 or GB17421, 5 round trips, ≥10Plot/L |
Applications
Mildly contaminated industrial applications, such as precision processing, testing and measurement in environments like low-dust laser processing, laboratory applications, and oil-free and water-mist-free conditions, as well as precision positioning applications with demanding cost and space requirements.
Key Features
Non-contact linear motor direct drive with low cogging, smooth motion and high dynamic response; integrated sealing protection design (fully sealed bellows covers) preventing contamination from entering the internal structure; long-life rolling-friction bearing system; 7075 aviation-grade aluminum precision-machined by CNC; standard modular design providing flexible single-axis/multi-axis solutions and cable management solutions; 225 mm load carriage with bi-directional repeatability better than 1 μm.
Datasheet
Product Datasheet
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Supplier Information
Sichuan CNBHC Technology Co., Ltd. (CNBHC) has long been dedicated to providing ultra-precision motion control core subsystems for fields such as ultra-precision machine tools, free-form surface mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopic imaging, micro-nano manufacturing, high-precision packaging and testing, and metrology and inspection.
With extreme performance that distinguishes it from competitors, CNBHC continues to provide core components and system solutions for the advanced equipment industry.
CNBHC always adheres to international general testing standards such as GB17421, ISO230-2, and VDI3441, striving to provide customers with continuous, stable, and high-quality products and services.
CNBHC always upholds the responsibility of "pursuing excellent quality and creating a national brand", insists on basic research, inherits the spirit of craftsmanship, and forges ahead for the honor of Made in China.
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