Linear Positioning Stage
The ECO225LM series direct drive stage is the latest generation of sub-micron direct drive stages refined through continuous optimization, offering high accuracy, excellent mechanical repeatability and a side-sealing structure, achieving nanometer-level minimum incremental motion and sub-micron bi-directional repeatability at low cost. It uses a specially customized linear motor as the drive element, which features extremely low cogging and normal attractive force, high thrust and smooth motion, combining sub-micron positioning capability with outstanding high dynamic response. The stage uses a long-life precision linear guideway bearing system combined with a specially designed linear-friction side-sealing structure, which effectively prevents process debris, dust and obvious particles from entering the stage and improves product service life; an optional positive-pressure air purge system is available, making it the ideal solution for applications requiring high reliability, high performance, precision positioning and low cost.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 200mm / 300mm / 400mm / 500mm / 600mm |
| Accuracy | <1.5μm |
| Min. Incremental Motion | 50nm |
| Bi-Directional Repeatability | <0.75μm |
| Straightness | 2μm |
| Flatness | 200mm/300mm/400mm: 2.5μm; 500mm/600mm: 3μm |
| Roll | 200mm/300mm/400mm: 12 arc sec; 500mm/600mm: 14 arc sec |
| Yaw | 10 arc secarc sec |
| Maximum Force (Continuous) | 90N |
| Maximum Speed | 1500mm/s |
| Maximum Acceleration | 2g |
| Load Capacity Horizontal | 50kg |
| Load Capacity Side | 50kg |
| Moving Mass | 6.5kg |
| Stage Mass | 200mm: 25.1kg; 300mm: 27.9kg; 400mm: 31.2kg; 500mm: 34.4kg; 600mm: 37.6kg |
| Traceability For Calibration | ISO230-2 or GB17421,往返5次,≥10Plot/L |
Applications
Key Features
Datasheet
Supplier Information
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