Linear Positioning Stage
The ECO190LMS series economy direct drive stage is the latest generation of economy sub-micron direct drive stages refined through continuous optimization, offering high accuracy and an integrated sealing protection design, achieving minimum incremental motion better than 50 nm and sub-micron bi-directional repeatability at low cost. The ECO190LMS series delivers better geometric accuracy than competing products, with bi-directional repeatability <1 μm and positioning accuracy of <1.5 μm after linear error compensation. The ECO190LMS direct drive stage uses a specially customized linear motor as the drive element, which features extremely low cogging and normal attractive force, high thrust and smooth motion, combining sub-micron positioning capability with outstanding high dynamic response in a more compact and efficient structure. The ECO190LMS is designed with many standard features and accessory options; the product is available in five models with standard design travels covering 200-600 mm, speeds up to 1500 mm/s, and a complete single-axis/multi-axis cable management solution. The stage uses a long-life rolling-friction bearing system with an integrated sealing protection design to prevent contamination from entering the internal structure.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 200mm、300mm、400mm、500mm、600mm |
| Min. Incremental Motion | 50nm |
| Bi-Directional Repeatability | <1μm |
| Yaw | 10arcsecarc sec |
| Maximum Force (Continuous) | 50N |
| Maximum Speed | 1500mm/s |
| Maximum Acceleration | 2g |
| Load Capacity (Horizontal) | 25kg |
| Load Capacity (Side) | 25kg |
| Moving Mass | 3.2kg |
| Stage Mass | 15.8 kg (200 mm travel); 19 kg (300 mm travel); 21.5 kg (400 mm travel); 24 kg (500 mm travel); 26.5 kg (600 mm travel) |
| Traceability For Calibration | ISO230-2 or GB17421, 5 round trips, ≥10Plot/L |
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