The SWI165LM Ite IV series sub-micron precision direct drive stage is the latest generation of sub-micron direct drive stages refined through continuous optimization. It delivers high accuracy and high dynamic performance, achieving nanometer-level minimum incremental motion and sub-micron bi-directional repeatability. Driven by a high-efficiency coreless linear motor, the stage features zero-clearance transmission, zero cogging, smooth motion and outstanding dynamic response. The stage uses a long-life precision linear guideway bearing system combined with a specially designed low-friction side-sealing structure, with an optional positive-pressure air purge system. Design travels range from 50 mm to 600 mm, with speeds up to 2000 mm/s, and a complete single-axis/multi-axis cable management solution is available. Cleanroom, vacuum and low-temperature versions can be provided through special treatment.
Applications requiring high throughput, high reliability, high performance, precision positioning and quiet operation; industrial applications such as high-dynamic laser processing solutions; mildly contaminated environments; space-constrained applications that also demand high performance.
165 mm load carriage, standard travels of 50-600 mm; bi-directional repeatability better than 150 nm, positioning accuracy better than 300 nm after linear error compensation; integrated side-sealing structure with low-cost, high-performance ultra-precision direct drive technology; standard modular design for flexible single-axis/multi-axis solutions; non-contact coreless linear motor direct drive with zero-clearance transmission and zero cogging.
<p>Sichuan Borui Huaxin Technology Co., Ltd. (CNBHC) is committed to providing ultra-precision motion control core subsystems for ultra-precision machine tools, free-form mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopy, micro-nano manufacturing, high-precision packaging testing, metrology, and other fields. CNBHC adheres to international standards such as GB17421, ISO230-2, and VDI3441, striving to deliver continuous, stable, and high-quality products and services. The company upholds the mission of 'Pursue Excellent Quality, Create National Brand', insisting on basic research and inheriting the spirit of craftsmanship to advance the honor of Chinese manufacturing.</p>