Z-Axis Positioning Stage

Z-Axis Positioning Stage

Supplier
Cnbhc
Part Number
SWI165ZS
Category
Motorized Stages
Origin
China

The SWI_ZS series dual-counterbalanced Z-axis precision direct drive stage is the best combination of speed, accuracy, system resolution, bi-directional repeatability, reliability, high rigidity and lightweight design. As a derivative of the SWI series, it delivers the same outstanding motion performance as the SWI series and is specifically designed for Z-axis applications requiring high accuracy, high rigidity and high dynamic response. The stage uses a frictionless dual counterbalance mechanism that maintains high performance while minimizing motor heating; the counterbalance capacity is user-adjustable from 0 to 20 kg. The dual counterbalance design minimizes the overall stage height and overturning torque while reducing the influence of straightness and angular runout on accuracy. It features non-contact direct drive technology with high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy; the unique structural design and compact size allow high performance even in tight installation spaces. Extremely high system resolution is the foundation of outstanding accuracy, bi-directional repeatability and position stability. The stage achieves minimum incremental motion of better than 30 nm in linear-motor Z-axis applications, and is completely backlash-free with near-zero system hysteresis, enabling precise, highly repeatable sub-micron motion. It features a standardized mounting pattern for easy system integration; 2-axis, 3-axis or more-axis applications can be flexibly assembled and configured using standard mounting holes.

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Overview

The SWI_ZS series dual-counterbalanced Z-axis precision direct drive stage is the best combination of speed, accuracy, system resolution, bi-directional repeatability, reliability, high rigidity and lightweight design. As a derivative of the SWI series, it delivers the same outstanding motion performance as the SWI series and is specifically designed for Z-axis applications requiring high accuracy, high rigidity and high dynamic response. The stage uses a frictionless dual counterbalance mechanism that maintains high performance while minimizing motor heating; the counterbalance capacity is user-adjustable from 0 to 20 kg. The dual counterbalance design minimizes the overall stage height and overturning torque while reducing the influence of straightness and angular runout on accuracy. It features non-contact direct drive technology with high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy; the unique structural design and compact size allow high performance even in tight installation spaces. Extremely high system resolution is the foundation of outstanding accuracy, bi-directional repeatability and position stability. The stage achieves minimum incremental motion of better than 30 nm in linear-motor Z-axis applications, and is completely backlash-free with near-zero system hysteresis, enabling precise, highly repeatable sub-micron motion. It features a standardized mounting pattern for easy system integration; 2-axis, 3-axis or more-axis applications can be flexibly assembled and configured using standard mounting holes.

Key Features

Frictionless dual-counterbalance design, user-adjustable from 0 to 20 kg; bi-directional repeatability up to better than 150 nm, positioning accuracy <300 nm after linear error compensation; high-rigidity lightweight structure design verified by finite element analysis; integrated side-sealing structure with low-cost, high-performance ultra-precision direct drive technology; standard modular design for flexible single-axis/multi-axis solutions

Datasheet

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Supplier Information

Sichuan CNBHC Technology Co., Ltd. (CNBHC) has long been dedicated to providing ultra-precision motion control core subsystems for fields such as ultra-precision machine tools, free-form surface mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopic imaging, micro-nano manufacturing, high-precision packaging and testing, and metrology and inspection. With extreme performance that distinguishes it from competitors, CNBHC continues to provide core components and system solutions for the advanced equipment industry. CNBHC always adheres to international general testing standards such as GB17421, ISO230-2, and VDI3441, striving to provide customers with continuous, stable, and high-quality products and services. CNBHC always upholds the responsibility of "pursuing excellent quality and creating a national brand", insists on basic research, inherits the spirit of craftsmanship, and forges ahead for the honor of Made in China.

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Z-Axis Positioning Stage
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