Filmetrics F3-CS Compact Thin-Film Thickness Measurement System
The Filmetrics F3-CS is a compact benchtop thin-film thickness measurement system based on spectral reflectance. Light reflected from the top and bottom interfaces of a film stack generates an interference spectrum, which is captured by the built-in spectrometer and fitted by the FILMeasure software against an extensive material library to report film thickness and optical constants (n and k) in under a second. The top-loading sample port with a flip-up cover makes measurement fast and repeatable, while the non-contact optical technique never touches or damages the sample. Covering a typical thickness range of 15nm to 75μm, the F3-CS handles dielectrics, photoresists, polymers and other transparent or semi-transparent films, offering an affordable, easy-to-use alternative to spectroscopic ellipsometers for R&D, failure analysis and production quality control.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Measurement Principle | Spectral Reflectance |
| Film Thickness Range | 15nm-75μm |
| Wavelength Range | 380-1050nm |
| Light Source | Tungsten-Halogen Lamp |
| Spectrometer Detector | CCD Array |
| Spot Size | 1.5mm |
| Measurement Time | <1s |
| Number of Measurable Layers | 1-3 |
| Refractive Index (n & k) Measurement | Supported |
| Thickness Accuracy | 0.2% or 1nm (whichever is greater) |
| Repeatability (1σ) | 0.05nm |
| Measurable Materials | SiO2, SiNx, Photoresist, Polyimide, Polymers, etc. |
| PC Interface | USB 2.0 |
| Measurement Software | FILMeasure |
| Sample Loading | Top-Loading with Flip Cover |
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