膜厚测量仪
The ULVAC膜厚测量仪 is a high-precision optical measurement device designed for thin film thickness analysis, offering automated measurement capabilities and advanced control systems.
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Overview
The ULVAC膜厚测量仪 is a high-precision optical measurement device designed for thin film thickness analysis, offering automated measurement capabilities and advanced control systems.
Specifications
| Parameter | Value |
|---|---|
| Model | 1500A, 2000A, 3000A |
| Wavelength Range | 530~750nm, 380~760nm (optional) |
| Spot Diameter | φ1mm, φ0.3mm (optional) |
| Incident Angle | 70° fixed |
| Film Thickness Reproducibility | 1σ=0.1nm |
| Film Thickness Range | 1nm~2μm |
| Measurement Time | Receiving: 20ms~3000ms, Calculation: 300ms |
| Stage | φ150mm automatic, φ200mm automatic, φ300mm automatic |
| Automatic Measurement | 200 points, 200 points, 2000 points |
| Control PC | Notebook Type (with operation and analysis software) |
| Machine Configuration | Measurement unit, controller, operation PC (Notebook Type), user manual (CD) |
Applications
1. Thin film thickness measurement in semiconductor manufacturing 2. Optical coating analysis 3. Quality control in industrial production
Key Features
1. High precision with 1σ=0.1nm reproducibility 2. Wide wavelength range options 3. Automated measurement with up to 2000 points 4. Flexible stage sizes for different applications
Datasheet
Product Datasheet
PDF
Supplier Information
<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>
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