膜厚测量仪

膜厚测量仪

Supplier
UlvacShanghai
Part Number
膜厚测量仪
Category
Optical Metrology
Origin
China

The ULVAC膜厚测量仪 is a high-precision optical measurement device designed for thin film thickness analysis, offering automated measurement capabilities and advanced control systems.

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Overview

The ULVAC膜厚测量仪 is a high-precision optical measurement device designed for thin film thickness analysis, offering automated measurement capabilities and advanced control systems.

Specifications

ParameterValue
Model1500A, 2000A, 3000A
Wavelength Range530~750nm, 380~760nm (optional)
Spot Diameterφ1mm, φ0.3mm (optional)
Incident Angle70° fixed
Film Thickness Reproducibility1σ=0.1nm
Film Thickness Range1nm~2μm
Measurement TimeReceiving: 20ms~3000ms, Calculation: 300ms
Stageφ150mm automatic, φ200mm automatic, φ300mm automatic
Automatic Measurement200 points, 200 points, 2000 points
Control PCNotebook Type (with operation and analysis software)
Machine ConfigurationMeasurement unit, controller, operation PC (Notebook Type), user manual (CD)

Applications

1. Thin film thickness measurement in semiconductor manufacturing 2. Optical coating analysis 3. Quality control in industrial production

Key Features

1. High precision with 1σ=0.1nm reproducibility 2. Wide wavelength range options 3. Automated measurement with up to 2000 points 4. Flexible stage sizes for different applications

Datasheet

Product Datasheet
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Supplier Information

Ul
UlvacShanghai
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<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

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膜厚测量仪
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