Turbo Molecular Pump
The Turbo Molecular Pump from Osaka Vacuum is a high-performance vacuum pump designed for advanced vacuum applications. It ensures efficient and reliable operation in various industrial and research environments.
Specification Snapshot
Power Consumption (W)
200-500
Flange Size (mm)
ISO100, ISO160
Cooling Method
Air cooling
Cooling Method
Water cooling
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Overview
The Turbo Molecular Pump from Osaka Vacuum is a high-performance vacuum pump designed for advanced vacuum applications. It ensures efficient and reliable operation in various industrial and research environments.
Specifications
| Parameter | Value |
|---|---|
| Rotation Speed (rpm) | 60000 |
| Pumping Speed (L/s) | 300-1000 |
| Ultimate Vacuum (Pa) | <1x10^-7 |
| Power Consumption (W) | 200-500 |
| Flange Size (mm) | ISO100, ISO160 |
| Cooling Method | Air cooling |
| Cooling Method | Water cooling |
| Weight (kg) | 15-25 |
Applications
1. Semiconductor manufacturing 2. Surface analysis 3. Vacuum coating 4. Research and development
Key Features
1. High-speed rotation for efficient vacuum generation 2. Compact and lightweight design 3. Multiple cooling options for flexible installation 4. Durable construction for long-term reliability
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Osaka Vacuum, Ltd. is a Japanese vacuum pump manufacturer founded in 1950. For over 75 years, the company has specialized in design, manufacturing, sales, and maintenance of vacuum pumps and systems. Its extensive product lineup includes magnetically levitated and ball-bearing turbo molecular pumps, dry vacuum pumps, roots pumps, oil-sealed rotary pumps, and vacuum systems, serving semiconductor, electronics, medical, aerospace, optical, and chemical industries worldwide.</p>
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