750-7020-G5 Sensor
The INFICON 750-7020-G5 sensor is designed for semiconductor chamber foreline monitoring, offering a reliable solution for precursor delivery fault detection. It integrates with FabGuard via the IMM-200 module to actively monitor excess precursor and derivatives.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum temperature | 200°C |
| Sensor Head Size (Maximum Envelope) | 23.9mm O.D. x 28.9mm (0.94in O.D. x 1.14in) |
| Mounting feedthrough | KF25 flange |
| Body and Holder Materials | 304 stainless steel |
| Spring Materials | Au plated BeCu |
| Coax line | 5mm (1.88in) O.D. stainless steel |
| Other mechanical parts | 18-8 or 304 stainless steel, Hastelloy® C276 |
| Insulators | >99% Al2O3 in vacuum; Teflon® used elsewhere |
| Wire | 1. Ni (in vacuum); 2. Ni plated Cu (elsewhere) |
| Braze | Vacuum process high temperature NiCr alloy |
| Crystal | 13.97mm (0.550in) diameter |
| Sensor Length | 50mm (1.97in) |
| Crystal Frequency | 6MHz |
Applications
Key Features
Datasheet
Supplier Information
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