SQM-160 Multi-Film Rate/Thickness Monitor
The SQM-160 uses proven quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. It offers high accuracy, low cost, and user-friendly operation, making it ideal for various applications in thin film measurement.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Sensor Inputs | Standard: two; optional: six |
| Measurement Frequency Range | 6.5 to 10MHz (adjustable) |
| Frequency Resolution | Standard: ±0.30Hz @6MHz; High resolution option: ±0.03Hz @6MHz |
| Thickness and Rate Resolution/Measurement | Standard: ±0.37Å; High resolution option: ±0.037Å |
| Measurement Interval | 0.10 to 2.0s (adjustable) |
| Measurement filter | One to 20 readings |
| Stored files | 99 |
| Analog outputs | Two (0 to 5V dc), rate and thickness |
| Digital inputs/relays | Two inputs |
| Digital inputs/relays | four relay outputs |
| Communications interface | Standard: RS-232; Optional: USB or Ethernet |
| Power | 100 to 120/200 to 240V ac (auto), 50/60Hz, 20W |
| CE compliance | Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD |
| RoHS Compliance | Yes |
| Housing/Mounting | 1/2 rack cabinet, 3.5in. high, 8.9×213×197mm (3.5×8.5×7.75in.) |
| Weight | 2.7kg (6lb.) |
| Windows Software | Provides remote setup and operation, (included) datalogging functions |
Applications
Key Features
Datasheet
Supplier Information
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