Zevision IMC300
The INFICON Zevision IMC300 is a next-generation thin film deposition controller designed for precision control, maximum repeatability, and unmatched crystal efficiency, making it ideal for modern optical coating applications.
Specification Snapshot
Resolution
15bits over full range (10V)
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Overview
The INFICON Zevision IMC300 is a next-generation thin film deposition controller designed for precision control, maximum repeatability, and unmatched crystal efficiency, making it ideal for modern optical coating applications.
Specifications
| Parameter | Value |
|---|---|
| Crystal Frequency Range | 6.0 to 4.5MHz |
| Frequency Resolution | 0.00056Hz @6MHz |
| Frequency Accuracy | ±2.5ppm to 50°C |
| Measurement Rate | 10Hz |
| Thickness and Rate Resolution | ±0.008Å and ±0.08Å/s |
| Thickness Accuracy | 0.5% |
| Rate Accuracy | 0.1% |
| Design Features | ModelLock |
| Processes | 200 |
| Layers per Process | 200 |
| Operating Temperatures | 0 to 50°C (32 to 122°F) |
| Weight | 4.1kg (9lb) |
| Main Power Supply | 125/250Vac, 50/60Hz |
| Rack Dimensions H×W×D | 132.5×213.1×314.3mm |
| Number of Sources | 2 BNC, Female (Without Option Card) |
| Control Voltage | ±10V, user configurable |
| Resolution | 15bits over full range (10V) |
| Number of Sensors | 2 Sensors (Without Option Card) |
| Compatible sensors | All |
| Digital Inputs | 8, event assignable |
| Input Rating | 24Vdc Max |
| Relay Outputs | 6, event assignable |
| Relay Rating | 30Vdc or 30Vac RMS or 42V peak at 2.5Amps |
| Display Type | TFT LCD Display with PCAP Touchscreen |
| Format | WQGA |
| Resolution | 800×480 |
| Backlighting | LED |
| Thickness Display Resolution | 1Å |
| Rate Display Resolution | 0.1Å/s for 0.0 to 99.9Å/s, 1Å/s for 100 to 999Å/s |
| Power Display Resolution | 0.01% |
| Data Display Rate | 1Hz |
| Graphic Display Functions | Rate Deviation ±5, 10, 20, or 40Å/s or Power at 0.0 to 100% |
| Communications Type | RS-232/Ethernet |
Applications
1. Optical coating processes 2. Thin film deposition 3. High-precision measurement systems
Key Features
1. Precision control for maximum repeatability 2. Unmatched crystal efficiency 3. Easy system integration with touchscreen interface 4. ModelLock technology for enhanced measurement accuracy 5. Long-term reliability and upgrade options
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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