IMM-100 Thin Film Deposition Monitor
The IMM-100 is a deposition monitor designed with ModeLock technology to ensure maximum reproducibility and uniformity in thin film deposition processes. It offers high thickness accuracy, excellent measurement resolution, and minimal rate noise, making it a reliable tool for precision monitoring.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Sensor Inputs | One |
| Sensor Inputs | female BNC |
| Measurement Frequency Range | 6.0 to 4.5MHz (fixed) |
| Frequency Resolution | ±0.0035Hz @ 6MHz |
| Measurement Interval | 0.1s |
| Reference Frequency Stability | ±2ppm @ 0-50°C |
| Rate and Thickness Resolution | 0.0042Å (new crystal); 0.0076Å (crystal @ 4.5MHz) over 100ms sample for material density=1.0, Z-Ratio=1.0 |
| Measurement Technique | ModeLock |
| Input Voltage | 24V (dc) |
| Operating Temperature | 0 to 50°C (32 to 122°F) |
| Size | 222.6mm (8.76in) x 106.1mm (4.18in) x 35.3mm (1.39in) |
| Weight | 0.48kg (1.05lbs) |
| Communication Type | EtherCAT, 2 RJ45 jacks, supports data daisy chaining. Explicit device ID via switches |
Applications
Key Features
Datasheet
Supplier Information
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