IC6 Thin Film Deposition Controller
The IC6 Thin Film Deposition Controller is designed to provide exceptional value by combining high performance with unique features for precise thin film deposition processes. It offers high-resolution rate and thickness measurement, reliable process control, and effortless setup, making it ideal for optical applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Frequency Resolution | ±0.0035Hz@6MHz |
| Thickness and Rate Resolution/Measurement | ±0.00433Å |
| Measurement Frequency Range | 6.0 to 4.5MHz (fixed) |
| Thickness Accuracy | 0.5% |
| Measurement Interval | 0.1s |
| Multiple Sensor Measurement | Yes (up to eight sensors) |
| Auto-Z | Yes |
| Codeposition | Yes (up to six sources) |
| Material Programs | 32 |
| Process Layers (per process) | 200 |
| Processes | 50 (processes can be linked together) |
| USB Memory | Yes |
| Data Logging | Yes |
| Sensors | Single: eight, Dual/CrystalTwo: four/eight (with CrystalTwo Switch), CrystalSix: eight, Crystal12: eight, Generic: eight |
| Number of Sources | Up to six |
| Source Control Voltages | 0 to ±10V(dc), adjustable |
| Output Resolution | 15 bits over full range (0 to 10V(dc)) |
| Crucible Positions | 64 |
| Inputs | 14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground |
| Outputs | Eight standard, up to 24 optional programmable SPST relays rated at 30V(dc) or 30V(ac) RMS or 42V(dc) peak @2.5amps; 14 optional TTL outputs |
| Recorder Output | 0 to +10V(dc), adjustable |
| Logic Statements | 100 fully programmable; up to five actions, five events per statement |
| Communications Standard | RS-232 |
| Communications Optional | Ethernet |
| Thickness Resolution | 1Å for 0 to 9.999kÅ, 10Å for 10.00 to 99.99kÅ, 100Å for 100.0 to 999.9kÅ |
| Rate Resolution | 0.001Å/s for 0 to 9.999Å/s if rate filter time setting is 10s or greater, 0.01Å/s for 10.00 to 99.99Å/s, 0.1Å/s for 100.0 to 999.9Å/s |
| Power Requirements | 100 to 230V(ac) ±15% |
| Operating Temperature | 0°C to 50°C (32°F to 122°F) |
| Dimensions (HxWxD) | 133x483x330mm (5.25x19x13in) |
| Weight | 5.9kg (13lb) |
Applications
Key Features
Datasheet
Supplier Information
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