EM-6910/EM-6920 Scanning Electron Microscope
The EM-6910 and EM-6920 are advanced scanning electron microscopes designed for high-resolution imaging and analysis. They are equipped with state-of-the-art electron optics and detectors, providing exceptional imaging performance and analytical capabilities.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Resolution | 3nm (EM-6910), 2nm (EM-6920) |
| Magnification | 10x-300,000x |
| Acceleration Voltage | 0.5kV-30kV |
| Electron Gun Type | Tungsten filament |
| Vacuum System | Turbo molecular pump and rotary pump |
| Stage Movement Range | X: 50mm, Y: 50mm, Z: 5-50mm, Tilt: -10° to +90° |
| Detector Type | Secondary Electron Detector (SED), Backscattered Electron Detector (BSED) |
| Chamber Size | Φ300mm |
| Sample Size | Up to 150mm diameter |
| Imaging Modes | Secondary electron imaging |
| Imaging Modes | Backscattered electron imaging |
| Energy Dispersive Spectroscopy | Optional |
| Power Supply | AC 220V, 50Hz, 3kW |
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