IH-860 DISC
The IH-860 DISC is a high-performance sputtering system designed for precision thin-film deposition, offering advanced features for industrial applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Working Pressure | 1×10^-3Pa |
| Target Size | 8 inches |
| Substrate Size | 3.5 inches |
| Deposition Rate | 1.2nm/s |
| Film Thickness Uniformity | ±2% |
| Target Material Type | Metal |
| Target Material Type | Oxide |
| Target Material Type | Nitride |
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Key Features
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