Vacuum Coating System

Vacuum Coating System

Supplier
UlvacShanghai
Part Number
Vacuum Coating System
Category
Material-based Production Equipment
Origin
China

This vacuum coating system is designed for high-precision thin film deposition, offering advanced technology for various industrial applications.

Specification Snapshot
Maximum Substrate Size
300mm x 300mm
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Overview

This vacuum coating system is designed for high-precision thin film deposition, offering advanced technology for various industrial applications.

Specifications

ParameterValue
Working Pressure10^-6 Torr
Maximum Substrate Size300mm x 300mm
Deposition Rate0.1-10nm/s
Power RequirementsAC 220V, 50/60Hz
Vacuum Pump TypeTurbo Molecular Pump
Control SystemPLC-based with touch screen interface
Cooling SystemWater-cooled
Gas Flow ControlMass Flow Controller
Heating Temperature RangeRoom temperature to 500°C

Applications

1. Semiconductor manufacturing 2. Optical component production 3. Research and development 4. Thin film coating

Key Features

1. High precision thin film deposition 2. Advanced vacuum technology 3. User-friendly PLC control system 4. Suitable for various substrate sizes

Datasheet

Product Datasheet
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Supplier Information

Ul
UlvacShanghai
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<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

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