Chuck System
The Chuck System is designed for precise temperature control and high-performance testing in optical and electronic applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Chuck Leakage STCS | <100pA@25℃@10V, <200pA@200℃@10V |
| Chuck Leakage LNCS | <1pA@25℃@10V, <2pA@200℃@10V |
| Chuck Leakage HVCS | <1pA@25℃@10V, <2pA@200℃@10V, <5pA@25℃@3000V, <10pA@200℃@3000V |
| Max Test Voltage STCS | 500V |
| Max Test Voltage LNCS | 500V |
| Max Test Voltage HVCS | 10kV |
| Chuck Plating STCS | Nickel/Gold |
| Chuck Plating LNCS | Nickel/Gold |
| Chuck Plating HVCS | Gold |
| Chuck Surface Flatness | <3μm |
| Vacuum Type STCS | Groove/Many Holes |
| Vacuum Type LNCS | Many Holes |
| Vacuum Type HVCS | Many Holes |
| Vacuum Layout STCS | 8" Chuck: 6" and 8", 12" Chuck: 8" and 12" |
| Vacuum Layout LNCS | 8" Chuck: 4", 6", 8" and Center (4mm x 4mm), 12" Chuck: 4", 6", 8", 12" and Center (4mm x 4mm) |
| Vacuum Layout HVCS | 8" Chuck: 4", 6", 8" and Center (4mm x 4mm), 12" Chuck: 4", 6", 8", 12" and Center (4mm x 4mm) |
| Connection Type STCS | Coaxial |
| Connection Type LNCS | Triaxial |
| Connection Type HVCS | Coaxial/Triaxial |
| Heating & Cooling Rate STCS | +25℃→+200℃<25min, +200℃→+25℃<15min (40min), +25℃→-60℃<30min, -60℃→+25℃<12min |
| Heating & Cooling Rate LNCS | +25℃→+200℃<25min, +200℃→+25℃<20min (60min), +25℃→-55℃<45min, -55℃→+25℃<12min |
| Requested CDA Pressure | ≥6bar |
| Requested CDA Flow Rate | ≥500L/min |
| Power Consumption STCS | 1000VA (Ambient System), 3500VA (Cold System) |
| Power Consumption LNCS | 1000VA (Ambient System), 3500VA (Cold System) |
| Power Consumption HVCS | 1000VA (Ambient System), 3500VA (Cold System) |
| Temperature Control Method | Electric Heating and CDA Cooling |
| Temperature Control Resolution | ±0.01℃ |
| Temperature Stability | ±0.1℃ |
| Temperature Uniformity | <±0.5℃/±0.5℃ |
| Temperature Range | -65℃~+300℃ |
| Optional Chuck Size | 8"/12" |
Applications
Key Features
Datasheet
Supplier Information
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