Filmetrics Profilm3D
Filmetrics Profilm3D is a high-precision optical profiler designed for surface measurement and analysis, offering advanced features such as PSI and WLI technologies for 3D surface profiling and color imaging.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Z Range | 100mm |
| Piezo Stage Scan Range | 500μm |
| Vertical Resolution | 12μm |
| XY Sample Stage Scan Range | 100mm×100mm (Profilm3D), 200mm×200mm (Profilm3D-200) |
| Maximum Sample Stage Load | 2.5kg |
| Tilt Measurement Range | ±5° |
| Camera resolution | 2592×1944 (5MP) |
| Magnification | 1X, 2X, 4X |
| Color Imaging | Yes |
| WLI Measurement Thickness Range | 50nm-10mm |
| PSI Measurement Thickness Range | 0-3μm |
| WLI RMS Error | 1.0nm |
| PSI RMS Repeatability | 0.1nm |
| Step Measurement Accuracy | 0.79% |
| Step Measurement Accuracy Repeatability | 0.15% |
| Reflectivity Measurement Range | 0.05%-100% |
| ISO 25178 Compliance | Yes |
| Sample Stage Height Range | 265mm (Profilm3D), 365mm (Profilm3D-200) |
| Machine Dimensions | 305mm×305mm×550mm (Profilm3D), 406mm×406mm×550mm (Profilm3D-200) |
| Machine Weight | 15kg (Profilm3D), 22kg (Profilm3D-200) |
| Magnification Range | 5X, 10X, 20X, 50X, 100X |
| Numerical Aperture | 0.13 (5X), 0.3 (10X), 0.4 (20X), 0.55 (50X), 0.7 (100X) |
| Working Distance | 9.3mm (5X), 7.4mm (10X), 4.4mm (20X), 2.2mm (50X), 2.1mm (100X) |
| Sampling Size at 4X Digital Magnification | 1.76μm (5X), 0.88μm (10X), 0.44μm (20X), 0.176μm (50X), 0.088μm (100X) |
| Field of View | 2.1μm (5X), 0.92μm (10X), 0.69μm (20X), 0.5μm (50X), 0.42μm (100X) |
| Maximum Sample Tilt Angle | 14° (5X), 21° (10X), 25° (20X), 21° (50X), 42° (100X) |
Applications
Key Features
Datasheet
Supplier Information
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