Zeta-388 Optical Profiler
The Zeta-388 optical profiler is a non-contact, 3D surface topography measurement system designed for automated defect inspection and precise measurements of step heights, roughness, and film thickness. It features ZDot™ technology and multi-mode optics for high-resolution imaging.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Optical Resolution | 5MP |
| Sample Size Range | 45×35μm to 9.5×7.5mm |
| Film Thickness Range | 30nm to 100μm |
| Step Height Measurement Range | up to 250nm |
| Stage Size | 200mm motorized XY stage |
| Scanning Modes | Brightfield, darkfield, differential image contrast (DIC) |
| Autofocus | Enabled |
| Light Source Type | Broadband white light or 405nm monochromatic LED |
| Sample Loading | 100, 150, and 200mm wafers |
| Vibration Isolation | Built-in vibration isolation and acoustic enclosure |
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