Tencor P-170 Stylus Profiler
The Tencor P-170 Stylus Profiler is a cassette-to-cassette system designed for high-precision surface measurement. It offers advanced capabilities for 2D and 3D scanning, step height measurement, roughness analysis, and thin film stress evaluation, making it ideal for semiconductor, LED, MEMS, and data storage applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Scan Length | ≤200mm |
| Vertical Range | ≤1mm |
| Force Control Range | 0.03g-50g |
| Sample Size Range | 75mm-200mm |
| Video Resolution | 5MP |
| Step Height Standards | 8nm-250μm |
| Sample Chuck Type | Vacuum chuck |
| Sample Chuck Type | stress chuck |
| Optical Reference Plane | Ultra-flat |
| Software Support | Apex software, SECS/GEM |
| Measurement Accuracy | Sub-Angstrom |
| Sample Handling | Cassette-to-cassette |
| Scanning Mode | 2D and 3D |
| Sample Alignment | Automated |
| Sample Type | Opaque and transparent samples |
| Optical System | Dual view optics |
| Isolation Table | Air isolation |
| Stylus Type | Diamond stylus, tip radius 40μm-50μm, angle range 20°-100° |
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Supplier Information
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