ETHOS NX5000
ETHOS NX5000 is a high-performance focused ion beam scanning electron microscope (FE-SEM) designed for advanced material processing and imaging applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| SIM Resolution (C,P) | 4nm@30kV, 60nm@2kV (Edge resolution) |
| Accelerating Voltage | 0.1kV–30kV |
| Max Beam Current | 10nA |
| Ion Source | Ga Liquid Metal Ion Source |
| SEM Resolution (C,P) | 1.5nm@1kV, 0.7nm@15kV SEM resolution at optimum Imaging WD |
| Electron Source | Cold cathode FE source |
| Stroke | X,Y: 155mm, Z: 16.5mm, R: 360°, T: -10° to +59° |
| Detectors | SEM In-Column: Secondary Electron Detector (SE(U)), Back Scattered Electron Detector (BSE(U)), Back Scattered Electron Detector (BSE(L)) |
| Chamber Port | Secondary Electron Detector (SE(L)) |
| Sub-Chamber | Configurable Subchamber for manual loading or an optional Auto-Loading type |
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Key Features
Datasheet
Supplier Information
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