MSA-100-3D Micro System Analyzer
The MSA-100-3D Micro System Analyzer is a high-precision instrument designed for 3D vibration measurement of MEMS and microsystems. It offers sub-pm resolution for both out-of-plane and in-plane motion, enabling detailed analysis of microstructures.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Frequency Range H-Version | up to 100kHz |
| Frequency Range M-Version | up to 2.5MHz |
| Frequency Range V-Version | up to 25MHz |
| Displacement Resolution | sub-pm |
| Laser Spot Size | <4μm |
| Working Distance | 38mm |
| Bandwidth | 25MHz |
| Scanning Method | Single-point and full-field scanning |
| Probe Station Compatibility | Yes |
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