TruPlasma RF Series
TRUMPF Hüttinger's Retrofit program offers a solution to replace aged legacy RF generator equipment for semiconductor processing tools. The TruPlasma RF series provides high reliability, efficiency, and reduced energy and cooling costs, extending the lifetime of tools with pre-configured Plug & Play kits.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Output Power TruPlasma RF 1000-3/13 | 3kW |
| Output Power TruPlasma RF 3000-6/13 | 6kW |
| Output Power TruPlasma RF 1000-1/13 Air | 1kW |
| Nominal Load Impedance | 50Ω |
| Output Frequency | 13.56MHz |
| Line Voltage TruPlasma RF 1000-3/13 | 200-480V |
| Line Voltage TruPlasma RF 3000-6/13 | 200-480V |
| Line Voltage TruPlasma RF 1000-1/13 Air | 190-240V |
| Line Frequency | 50-60Hz |
| Line Input Power TruPlasma RF 1000-3/13 | 4.1kVA |
| Line Input Power TruPlasma RF 3000-6/13 | 7.9kVA |
| Line Input Power TruPlasma RF 1000-1/13 Air | 1.6kVA |
| Power Factor | >0.9 |
| Sync Interfaces | yes |
| Analog/Digital Interfaces | yes |
| RS232/RS485 Interfaces | yes |
| Profibus Interfaces | yes |
| EtherCAT Interfaces | yes |
| DeviceNet Interfaces TruPlasma RF 1000-3/13 | yes |
| DeviceNet Interfaces TruPlasma RF 3000-6/13 | yes |
| DeviceNet Interfaces TruPlasma RF 1000-1/13 Air | no |
| Weight TruPlasma RF 1000-3/13 | 18kg |
| Weight TruPlasma RF 3000-6/13 | 38kg |
| Weight TruPlasma RF 1000-1/13 Air | <15kg |
| IP Protection Class TruPlasma RF 1000-3/13 | 30 |
| IP Protection Class TruPlasma RF 3000-6/13 | 30 |
| IP Protection Class TruPlasma RF 1000-1/13 Air | 20 |
| Maximum Water Pressure | 7bar |
| Minimum Pressure Difference | 1.1bar |
| Minimum Flow Rate TruPlasma RF 1000-3/13 | 4l/min |
| Minimum Flow Rate TruPlasma RF 3000-6/13 | 8l/min |
| Coolant Temperature | 5-35°C |
| Overall Efficiency TruPlasma RF 1000-3/13 | >80% |
| Overall Efficiency TruPlasma RF 3000-6/13 | >80% |
| Overall Efficiency TruPlasma RF 1000-1/13 Air | >70% |
| Certificates/Standards | Semi S2, SEMI F47, UL, CE, RoHS, NRTL |
Applications
Key Features
Datasheet
Supplier Information
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