TruPlasma Bipolar Series 4000 (G2.1)
The TruPlasma Bipolar Series 4000 (G2.1) water-cooled power supplies are designed for plasma-assisted film deposition processes such as PECVD and dual cathode sputtering. They are ideal for applications requiring high reliability and performance, including semiconductor manufacturing, architectural glass coating, solar cell production, high-quality hard and decorative coatings, and optical films.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Regulation Modes | Power |
| Regulation Modes | Voltage |
| Regulation Modes | Current |
| Efficiency | >90% (typically) |
| Input Line Voltage | 380-480V±10% |
| Input Line Frequency | 50Hz/60Hz |
| Arc Handling | 40kArc/s arc handling rate, <0.3mJ/kW (typically) |
| Ignition | Up to 2000V |
| Output Modes | Bipolar rectangular pulsing with off time |
| Output Modes | Bipolar trapeze pulsing with off time |
| Output Modes | Bipolar step mode |
| Output Modes | Unipolar pulsing |
| Output Modes | DC |
| Pulsing Frequency | 1Hz-100kHz |
| Regulation Accuracy | ±0.5% |
| Regulation Repeatability | ±0.2% |
| Protection Class | IP40 |
| Output Connection | M8 bolt |
| Ambient Temperature | +5°C to +45°C (operation), -25°C to +55°C (storage) |
| Cooling Water Temperature | Up to +35°C |
| Cooling Water Pressure | Max. 7bar |
| Humidity/Air Pressure | 5%-85% non-condensing, 860hPa-1060hPa operating |
| Interfaces | RS-232, RS-485 or Profibus, EtherCat, DeviceNet, USB, Ethernet/IP, Profinet |
| Other | Analog |
| Other | Active front panel |
| Single Operation Power (kW) | 10, 20, 30, 40, 60 |
| Single Operation Current (A) | 25, 50, 75, 100, 150 |
| Single Operation Voltage (V) | 1000 |
| Single Operation Dimensions | 4U, 19"; 8U, 19" |
| Single Operation Water Flow Rate | >6l/min, >8l/min, >16l/min |
| Single Operation Weight | 50kg, 100kg |
| Parallel Operation Power (kW) | 80, 100, 120, 150, 180 |
| Parallel Operation Current (A) | 200, 250, 300, 375, 450 |
| Parallel Operation Voltage (V) | 1000 |
| Parallel Operation Dimensions | 2x8U, 19"; Ex. 1x8U, 1x12U, 19"; Ex. 1x12U, 19" |
| Parallel Operation Water Flow Rate | >16l/min, >24l/min, >48l/min |
| Parallel Operation Weight | 2x100kg, 2x150kg, 3x150kg |
Applications
Key Features
Datasheet
Supplier Information
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