SRII Ion Implanter Series
The SRII Ion Implanter Series offers advanced ion implantation solutions for semiconductor manufacturing, featuring high precision, energy efficiency, and compatibility with various wafer sizes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Species | H/He, Al/N/B/P/As, B/P/As |
| Application | SOI materials, semiconductor devices, power devices, SiC, logic/memory/power/CIS |
| Energy Accuracy | ±1% |
| Max Wafer Temperature | 600°C |
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Key Features
Datasheet
Supplier Information
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