Metal Heater
The Metal Heater is designed for precise thermal control in semiconductor equipment, ensuring stable and repeatable performance in processes such as heat treatment, temperature control during engraving, and sealing and testing.
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Overview
The Metal Heater is designed for precise thermal control in semiconductor equipment, ensuring stable and repeatable performance in processes such as heat treatment, temperature control during engraving, and sealing and testing.
Specifications
| Parameter | Value |
|---|---|
| Surface Roughness (Ra) | <0.4μm |
| Flatness | <0.025mm |
| Perpendicularity | <0.05mm |
| Welding Bonding Rate | ≥95% |
| Temperature Uniformity | ±1% |
| Chamber Uniformity | ±5% |
| Heater Banding | Custom |
| Test Chamber | ✓ |
Applications
1. Heat treatment in semiconductor equipment 2. Temperature control during engraving processes 3. Sealing and testing
Key Features
1. High precision thermal control capability 2. Comprehensive heater development capability 3. Excellent stability and repeatability through optimized input and flow design
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Vital Materials is a global high-tech company focused on the research, development, production, sales and recycling of rare and advanced materials. Founded in 1995, the company has developed into one of the world's leading all-round suppliers of rare and dispersed metals, high-purity materials, functional compounds, devices and downstream systems.</p>
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