V Series Mass Flow Controller (MFC)
The V Series MFC is designed for precise gas flow control in semiconductor manufacturing and other industries, offering high accuracy, fast response time, and resistance to pressure and temperature variations.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Flow Range | 0.025-2000sccm |
| Control Accuracy | ±0.5%S.P. (0.5%-100%F.S.) |
| Response Time | <100ms (10%-100%F.S.), <300ms (0.5%-10%F.S.) |
| Leak Rate | <10⁻⁹atm·cc/sec (He) |
| Repeatability | ±0.2%S.P. (0.5%-100%F.S.) |
| Operating Pressure Range | 100-300kPaG (14.5-43.5psig) |
| Design Pressure | 2.07MPaG (300psig) |
| Operating Temperature Range | 15-50°C |
| Material | 金属 (耐注塑PCTFE) |
| Surface Treatment | 符合SEMI F19标准 |
| Communication Protocol | EtherCAT, DeviceNet, RS-485 |
| Supply Voltage | 11-24VDC |
| In-Rush Current | <200mA |
Applications
Key Features
Datasheet
Supplier Information
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