Diode Laser System for Laser Wafer Annealing - DLight®S Series

Diode Laser System for Laser Wafer Annealing - DLight®S Series

Supplier
Focuslight
Part Number
Diode Laser System for Laser Wafer Annealing - DLight®S Series
Category
Semiconductor Manufacturing Equipment
Origin
China

The DLight®S Series diode laser system is designed for high-precision laser wafer annealing applications, offering modular design, high power density, and narrow beam width for consistent performance.

Specification Snapshot
Max Output Power
1500W
Standard Output Power
1050W
Wavelength
808nm
Operating Current
≤100A
Operating Voltage
≤40V
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Overview

The DLight®S Series diode laser system is designed for high-precision laser wafer annealing applications, offering modular design, high power density, and narrow beam width for consistent performance.

Specifications

ParameterValue
Operation ModeCW
Max Output Power1500W
Standard Output Power1050W
Power Stability±2%
Wavelength808nm
Wavelength Tolerance±5nm
Beam Length: Top-hat Area11.5±0.5mm
Beam Length: Beam ProfileTop hat
Beam Length: Uniformity≥95%
Beam Width: FWHM70±5μm
Beam Width: Beam ProfileGaussian
Beam Width: Stability≤1μm
Working Distance45-50mm
Depth of Focus±80μm
Operating Current≤100A
Operating Voltage≤40V
Impact Resistance≥1g
Laser System Motion Velocity: Working Surface≤500mm/s
Laser System Motion Velocity: Focus Axis≤10mm/s
Operating Temperature25°C
Storage Temperature5-45°C
Cooling MethodDI Water Cooling
DI Water Quality2-5μS/cm
Dimensions (Height × Width × Depth)480×155×192mm
System ConfigurationPower Supply/Controller/Cooling System
Optional ConfigurationPyrometer/Beam Quality Analysis System/Power Meter

Applications

1. Dynamic surface annealing 2. Laser spike annealing 3. Film annealing 4. Material surface treatment

Key Features

1. Narrow beam width 2. High power density 3. Modular design, easy maintenance 4. High product consistency 5. Multiple additional functions

Datasheet

Product Datasheet
PDF
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Supplier Information

Fo
Focuslight
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<p>Focuslight Technology is a national high-tech enterprise and a company listed on the Science and Technology Innovation Board of the Shanghai Stock Exchange (stock code: 688167). It was established in September 2007. It is mainly engaged in the research and development, production and sales of laser light sources and raw materials, optical components in the upstream of the photonic industry chain, and photonic application modules, modules and subsystems in the midstream of the photonic industry chain. It is currently expanding its global photonic process and manufacturing service business. The company focuses on the application directions of optical communications, consumer electronics, and pan-semiconductor manufacturing processes. It has now developed into an influential company and brand in the field of high-power semiconductor lasers and applications in the world. It has production bases and core technical teams in Xi'an, Dongguan, Shaoguan, and Hefei in China, Dortmund in Germany, Neuchâtel in Switzerland, Singapore, and Malaysia.</p>

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Diode Laser System for Laser Wafer Annealing - DLight®S Series
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