Piezoelectric Closed-Loop Direct-Drive Module RM52.11
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Specifications
| Parameter | Value |
|---|---|
| Travel [400N] | 200 μm |
| Integrated Sensor | LVDT |
| Open-Loop Resolution | 20 nm |
| Closed-Loop Resolution | 100 nm |
| Positioning Repeatability | 0.3 μm |
| Thrust | 400 N |
| Resonant Frequency | 12 kHz |
Key Features
Datasheet
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Supplier Information
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