High-Load Closed-Loop Piezoelectric Actuator
Specification Snapshot
Travel
25μm
Integrated Sensor
Capacitance
Positioning Repeatability
20nm
Resonant Frequency
640Hz
Cable Length
3m
Mass
290g
Request a Quote
Download Datasheet
Specifications
| Parameter | Value |
|---|---|
| Travel | 25μm |
| Resolution (Open Loop) | 2.5nm |
| Resolution (Closed Loop) | 3nm |
| Thrust | 200N |
| Integrated Sensor | Capacitance |
| Positioning Repeatability | 20nm |
| Resonant Frequency | 640Hz |
| Cable Length | 3m |
| Mass | 290g |
| Material | Stainless Steel, Titanium Alloy |
| Interface | LEMO FFG.0B.303;BNC |
Key Features
Travel up to25μm;Millisecond Response;Direct Drive for Compact Size,High Stiffness and Wide Bandwidth;Built-In Capacitive-Sensor Closed Loop;For Lithographic Lens Adjustment,Precision Positioning,Mass-Flow Control,and Active/Adaptive Systems
Datasheet
Please provide your email to download the datasheet.
Your name
Email Address
Invalid email format. Please try again.
Send Request
Supplier Information
Raiven Technology, founded in 2023 and located in Shanghai Zhangjiang Science City, focuses on advanced measurement and control technology. Targeting fields such as pan-semiconductor and commercial aerospace, it provides micro/nano measurement and control solutions, including high-end drive control, advanced ceramics, and precision actuators. With a 2,500-square-meter industrialization base, its products have been applied in semiconductor lithography, inspection, and other equipment. The core team comes from semiconductor equipment, aerospace, and other industries with rich experience. The company is committed to providing one-stop solutions and services to drive the industrial and technological revolution.
Contact Us
Loading...
GetExperimental Plan
Name
Phone
+86
Organization
Use Case

Global Photonics Products
Database Platform
Database Platform
With 16 years of experience, we provide high-quality products and services to universities, research institutes, and industry.
50+ Detailed Categories · 3,000+ Global Brands · 100,000+ Photonics Products
1 Million+
In-depth analysis of professional academic resources in photonics
300,000
ProductsDatasheets Available Free
We will keep your personal information strictly confidential.
Product Quote
+86
* Select the quoting party:
By submitting, you agree to the User Service Agreement and Privacy Policy