HEX-70
HEX-70 Small Compact Six-Axis Parallel Stage,70mm Base,240g,up to5N Load/Large Motion Range.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Translational Stepping Travel [Approximate Value; X] | 11 mm |
| Translational Stepping Travel [Approximate Value; Y] | 11 mm |
| Translational Stepping Travel [Approximate Value; Z] | 6 mm |
| Rotational Travel [Approximate Value; ΘX] | 18 ° |
| Rotational Travel [Approximate Value; ΘY] | 21 ° |
| Rotational Travel [Approximate Value; ΘZ] | 30 ° |
| Dimensions [Approximate Value] | φ 70X44 |
| Weight [Approximate Value] | 240 g |
| Maximum Vertical Load [Approximate Value; Vertical] | 5 N |
| Maximum Horizontal Thrust [Approximate Value; Horizontal] | 2.5 N |
| Translational Positioning Resolution [Approximate Value] | 1 nm |
| Rotational Positioning Resolution [Approximate Value] | 3 µ° |
| Unidirectional Positioning Repeatability [Approximate Value; ±50] | ±50 nm |
| High-Vacuum Compatibility (HV) [Optional Configuration] | 1E-6 mbar |
| Ultrahigh-Vacuum Compatibility (UHV) [Optional Configuration] | 1E-10 mbar |
| Nonmagnetic [Optional; Customizable on Request] | Customizable on Request |
Datasheet
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Supplier Information
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