WLS-HFD-50-3D
The WLS-HFD-50-3D has 3 axes and a travel range of 30x30x10mm.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Number of Axes [Approximate Value] | 3 |
| Stepping Travel [Approximate Value] | 30 mm × 30 mm × 10 mm |
| Scanning Travel [Approximate Value] | >2 μm |
| Backplate-Mounting Dimensions [Approximate Value] | 95 mm × 95 mm × 74 mm |
| Direct-Mounting Dimensions [Approximate Value] | 50 mm × 50 mm × 69 mm |
| XY Maximum Load [Approximate Value; XY] | 20 N |
| Z Maximum Load [Approximate Value; Z] | 5 N |
| Maximum Speed [Open-Loop Positioning; Approximate Value; XY] | 10 (XY) |
| Maximum Speed [Open-Loop Positioning; Approximate Value; Z] | 5 (Z) |
| Positioning Resolution [Open-Loop Positioning; Approximate Value] | <1 nm |
| Sensor Resolution [Closed-Loop Positioning; Approximate Value] | 1 nm |
| Unidirectional Positioning Repeatability [Closed-Loop Positioning; Approximate Value; ±40] | ±40 nm |
| Material [Optional; Aluminum Base as Standard; Other Materials Customizable on Request] | Aluminum Base as Standard; Other Materials Customizable on Request |
| Vacuum [Optional Configuration] | HV(1E-6 mbar)、UHV(1E-10 mbar) |
| Low Temperature [Optional; Available on Request] | Available on Request |
| Nonmagnetic [Optional; Available on Request] | Available on Request |
Datasheet
Supplier Information
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