CF Vacuum Flange CF63
CF, or Conflat Flange, is a high-vacuum connection using static metal seals and capable of high-temperature bakeout2. Pressure ranges from a minimum <10-12 hPa to ambient. Nominal diameters include 16, 40, 63, 100, 160, 200, 2502. Applicable vacuum reaches 10^-12 mbar2. Seal materials are generally Viton, PTFE, or oxygen-free copper; flanges generally use 304 or 316 stainless steel. Fixed flanges are one-piece. Loose/rotatable flanges comprise a knife edge compressing copper gaskets and a bolt-retaining section. Through-holes require bolts and nuts; threaded holes accept bolts directly. Main materials are SUS304 or SUS304L because SUS304 outgasses little and is readily machined/welded. Installation is demanding. Copper gaskets deform under compression, so tighten bolts evenly. Uneven forces lift diagonally opposite flange areas and cause leakage. Approximate torques: M4: 20kgf·cm; M6: 70kgf·cm; M8: 100kgf·cm. Genderless CF flanges and copper gaskets are all metal and withstand bakeout above 250℃. Disadvantages are high cost and nonreusable copper gaskets. CF series: readily recognizable seals mainly serve ultrahigh vacuum, using copper-gasket metal sealing. After one use, gasket sealing deteriorates substantially; high-vacuum systems require gasket replacement after every disassembly. Standard sizes such as CF35 and matching standard copper gaskets are available.
Overview
Specifications
| Parameter | Value |
|---|---|
| Flange Outer Diameter | 114.00 mm |
| Flange Thickness | 17.50 mm |
| Bolt Circle Diameter | 92.20 mm |
| Bolt Hole Quantity and Dimensions | 8-8.4 mm |
Key Features
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