High-Precision Autofocus Sensor Focus 100W

High-Precision Autofocus Sensor Focus 100W

Supplier
Sks-tech
Part Number
Focus 100W
Category
Sensors
Origin
China

Coaxial Optical Measurement Provides Ultrahigh-Speed, High-Precision Sample Surface Height Measurements. Symmetric Differential Focal-Plane Measurement Ensures Excellent Sample Pattern Adaptability; Source Energy Monitoring Enables Rapid Automatic Stray-Light Calibration and Compensation.

Specification Snapshot
Spectral Width
±15 nm
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Overview

Coaxial Optical Measurement Provides Ultrahigh-Speed, High-Precision Sample Surface Height Measurements. Symmetric Differential Focal-Plane Measurement Ensures Excellent Sample Pattern Adaptability; Source Energy Monitoring Enables Rapid Automatic Stray-Light Calibration and Compensation.

Specifications

ParameterValue
Light Source TypeLED
Wavelength [Customizable Wavelength Configuration]630, 460 nm
Spectral Width±15 nm
Output FrequencyConfigurable 1, 2, 4, 8, 10 kHz
Object-Plane Beam SpotCustomizable Circular or Square Shape
Compatible ObjectivesMultiple Specifications from 5–50X Supported
Compatible Objective Pupil Diameter6-8 mm
Static RepeatabilityBetter Than ±1/8 DOF
Linear range [50X/0.9]±5µm@50X/0.9
Capture Range [50X/0.9]±7µm@50X/0.9
Measuring Head Dimensions461 mm × 150 mm × 160 mm
Working Distance [Distance Between Sensor Output Aperture and Objective Pupil Plane]103 mm
Controller Dimensions220 mm × 160 mm × 40 mm

Applications

Flat-Panel Display and PCB Optical Inspection Equipment (AOI); Semiconductor Inspection and Metrology; Measurement/Inspection of Unpatterned or Periodically Repeating Samples; Measurement/Inspection of Complex-Pattern Silicon Wafers.

Key Features

High precision, based on the Sukesi closed-loop control solution: static measurement repeatability ±1/8 DOF; dynamic focusing accuracy ±1/2 DOF. High speed, using the Sukesi high-speed acquisition board: output frequency up to 10 kHz with microsecond signal latency. In-house vibration reduction and reaction-force cancellation systems. Compatible with high-magnification, large-NA optics, including objectives up to NA 0.95. Excellent sample process adaptability: a broadband source and symmetric dual-channel differential measurement accommodate multilayer films, complex patterns, dense gratings, high reflectivity contrast, and other sample types. Focal-plane matching: built-in matched focal plane. Ease of use: real-time adaptive light intensity adjustment. Options: source wavelength, with single- or dual-wavelength choices for 100L; spot shape and size.

Datasheet

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Supplier Information

Sk
Sks-tech
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SKS Technology was founded in 2019, focusing on core modules and system solutions for high-end semiconductor equipment, committed to becoming a first-class supplier in the industry. The company has a multidisciplinary local team proficient in mechanics, electronics, algorithms, optics and software, with extensive technical experience and industry know-how in the design of complex precision systems, providing customers with comprehensive support in R&D, manufacturing and service. SKS products include: ultra-precision motion platforms (air bearing stages, mechanical stages, rotary stages, vacuum stages, vertical motion stages, etc.), motion control systems (controllers, control modules, software tools), optical measurement and sensing modules, which have been widely used in major semiconductor inspection, advanced packaging, lithography and other equipment. As a trusted technology partner, SKS continues to pay attention to customer needs and technology trends, jointly promote co-innovation, overcome key technical bottlenecks in high-end equipment, help customers maintain competitive advantages, and promote high-quality development of the industry.

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High-Precision Autofocus Sensor Focus 100W
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