High-Precision Autofocus Sensor Focus 100L
Coaxial Optical Measurement Provides Ultrahigh-Speed, High-Precision Sample Surface Height Measurements. Symmetric Differential Focal-Plane Measurement Ensures Excellent Sample Pattern Adaptability; Source Energy Monitoring Enables Rapid Automatic Stray-Light Calibration and Compensation.
Specification Snapshot
Spectral Width
±2 nm
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Overview
Coaxial Optical Measurement Provides Ultrahigh-Speed, High-Precision Sample Surface Height Measurements. Symmetric Differential Focal-Plane Measurement Ensures Excellent Sample Pattern Adaptability; Source Energy Monitoring Enables Rapid Automatic Stray-Light Calibration and Compensation.
Specifications
| Parameter | Value |
|---|---|
| Light Source Type | LD |
| Wavelength [Customizable Wavelength Configuration] | 405, 639, 785 nm |
| Spectral Width | ±2 nm |
| Output Frequency | Configurable 1, 2, 4, 8, 10 kHz |
| Object-Plane Beam Spot | Elongated Shape |
| Compatible Objectives | Multiple Specifications from 5–50X Supported |
| Compatible Objective Pupil Diameter | 10-14 mm |
| Static Repeatability [DOF=Depth of Focus, Refers to Objective Depth of Field] | Better Than ±1/10 DOF |
| Linear range [50X/0.95] | ±20µm@50X/0.95 |
| Capture Range [50X/0.95] | ±140µm@50X/0.95 |
| Measuring Head Dimensions | 70 mm × 70 mm × 130 mm |
| Working Distance [Distance Between Sensor Output Aperture and Objective Pupil Plane] | 100-280 mm |
| Controller Dimensions | 220 mm × 160 mm × 40 mm |
Applications
Flat-Panel Display and PCB Optical Inspection Equipment (AOI); Semiconductor Inspection and Metrology; Measurement/Inspection of Unpatterned or Periodically Repeating Samples; Measurement/Inspection of Complex-Pattern Silicon Wafers.
Key Features
High precision, based on the Sukesi closed-loop control solution: static measurement repeatability ±1/8 DOF; dynamic focusing accuracy ±1/2 DOF. High speed, using the Sukesi high-speed acquisition board: output frequency up to 10 kHz with microsecond signal latency. In-house vibration reduction and reaction-force cancellation systems. Compatible with high-magnification, large-NA optics, including objectives up to NA 0.95. Excellent sample process adaptability: a broadband source and symmetric dual-channel differential measurement accommodate multilayer films, complex patterns, dense gratings, high reflectivity contrast, and other sample types. Focal-plane matching: built-in matched focal plane. Ease of use: real-time adaptive light intensity adjustment. Options: source wavelength, with single- or dual-wavelength choices for 100L; spot shape and size.
Datasheet
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Supplier Information
SKS Technology was founded in 2019, focusing on core modules and system solutions for high-end semiconductor equipment, committed to becoming a first-class supplier in the industry. The company has a multidisciplinary local team proficient in mechanics, electronics, algorithms, optics and software, with extensive technical experience and industry know-how in the design of complex precision systems, providing customers with comprehensive support in R&D, manufacturing and service. SKS products include: ultra-precision motion platforms (air bearing stages, mechanical stages, rotary stages, vacuum stages, vertical motion stages, etc.), motion control systems (controllers, control modules, software tools), optical measurement and sensing modules, which have been widely used in major semiconductor inspection, advanced packaging, lithography and other equipment. As a trusted technology partner, SKS continues to pay attention to customer needs and technology trends, jointly promote co-innovation, overcome key technical bottlenecks in high-end equipment, help customers maintain competitive advantages, and promote high-quality development of the industry.
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