Vacuum Rotation Stage Plus Vacuum Translation Stage
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Specifications
| Parameter | Value |
|---|---|
| Motor | typical:VSS43.200.1,2; 200 step/revolution |
| Motor option [typical] | typical:+ resolver option with 1024 point per revolution |
| Motor option [typical] | typical:+ direct absolute encoder ring |
| Worm/wheel gear | typical:95:1 |
| Resolution [Motor；full step] | typical:0,019° full step |
| Resolution [resolver option；per count] | typical:0,0037° per count |
| Resolution [direct absolute encoder ring；26 bit read-head] | typical:0,09 µrad per count (26 bit read-head) |
| Minimum incremental motion [Motor / resolver option；microstep/open loop] | typical:0,002° (microstep/open loop) |
| Minimum incremental motion [direct absolute encoder ring；microstep/C-Loop] | typical:0,0001° (microstep/C-Loop) |
| Repeatability [Motor / resolver option] | typical:+/-0,002° |
| Repeatability [direct absolute encoder ring] | typical:+/-0,0001° |
| Travel range | typical:+/-360° can be freely limited by adjustable micro switches |
| Max speed | typical:20°/s recommended: limited by duty cycle in vacuum |
| Axial load capacity | typical:150 N |
Key Features
Datasheet
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