Vacuum Linear Stage Plus Vacuum Translation Stage
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Specifications
| Parameter | Value |
|---|---|
| Motor | typical:VSS43.200.1,2; 200 step/revolution |
| Motor option [typical] | typical:+ resolver option with 1024 point per revolution |
| Motor option [typical] | typical:+ direct incremental or absolute linear scale |
| Lead/screw pitch | typical:0,5 mm |
| Resolution [Motor；full step] | typical:2,5 µm full step |
| Resolution [resolver option；per count] | typical:0,5 µm per count |
| Resolution [direct incremental or absolute linear scale；per count] | typical:0,05 µm per count |
| Minimum incremental motion [Motor / resolver option；microstep/open loop] | typical:0,25 µm (microstep/open loop) |
| Minimum incremental motion [direct linear scale option；microstep/C-Loop] | typical:0,05 µm (microstep/C-Loop) |
| Repeatability [Motor / resolver option] | typical:<1 µm |
| Repeatability [direct linear scale option] | typical:+/-0,05 µm |
| Travel range | typical:50-250 mm (-100 with 2nd carrier) |
| Max speed | typical:3 mm/s recommended: limited by duty cycle in vacuum |
| Axial force | typical:100 N |
| Load capacity [single carrier] | typical:150 N |
| Load capacity [double carrier] | typical:300 N |
Key Features
Datasheet
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