Vacuum Linear Stage Compact Vacuum Translation Stage
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Specifications
| Parameter | Value |
|---|---|
| Resolution [Stepper；full step] | typical:2,5 µm full step |
| Resolution [Piezo Closed-Loop；per count] | typical:0,03 nm per count |
| Minimum incremental motion [Actuator: Stepper] | typical:0,1 µm |
| Minimum incremental motion [Actuator: Piezo Open-Loop] | typical:0,03 µm |
| Minimum incremental motion [Actuator: Piezo Closed-Loop] | typical:0,05 µm |
| Minimum incremental motion [Actuator: Manual drive] | typical:0,5 µm |
| Repeatability [Stepper] | typical:<1 µm |
| Repeatability [Piezo Open-Loop / Piezo Closed-Loop / Manual drive] | typical:+/-0,2 µm |
| Travel range [S size] | typical:12,5 mm |
| Travel range [M size] | typical:25 mm |
| Max speed [Stepper / Piezo Open-Loop / Piezo Closed-Loop] | typical:2 mm/s recommended: limited by duty cycle in vacuum |
| Axial force | typical:20 N |
| Bearings load capacity [S size] | typical:100 N |
| Bearings load capacity [M size] | typical:200 N |
| Pitch screw [Manual drive] | typical:0,25 mm |
Key Features
Datasheet
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