TMP 135-6000-100 XYZ configuration available Vacuum Translation Stage
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Specifications
| Parameter | Value |
|---|---|
| Travel range | 135mm |
| Resolution | 6.25 µm / motor step |
| Motorization-Voltage | 48 V |
| Motorization-Current | 1.2 A/phase |
| Motorization-Inductance | 0.9 mH/phase |
| Resolution | 6.25 nm/sm |
| Minimum Control Increment | 8 steps/motor |
| Linearity | <1% |
| Motorization | Hybrid Stepper motor, bipolar 200 steps/revolution |
| Motorization-Resistance | 1.8 Ω /phase |
| Unidirectional repeatability [RMS] | 50 μm RMS_ |
| Orientation fault-Pitch (/Y) | +/- 0.3mrad |
| Orientation fault-Rolling (/Z) | +/-0.3mrad |
| Orientation fault-Yaw (/x) | +/- 0.3 mrad |
Key Features
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