GALSA Series Motorized Nanopositioning Stage GALSA-125-P
GALSA servo-driven nanopositioning stages serve vertical sensor/camera positioning, optical focusing and interferometry. Robust low-friction anti-creep crossed rollers, precision-ground ball screws, rigid aerospace-aluminum bases and high-performance servos ensure long life and consistent motion. Optional encoders enable submicrometer repeatability. Standard features/options and customization accelerate system development and reduce effort. Accuracy is measured 25mm above the load table. Controller excluded from quotations.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 50mm / 100mm |
| Positioning Accuracy [Accuracy specifications measured 25mm above the load platform] | ±1μm / ±1μm |
| Bidirectional positioning repeatability [Accuracy specifications measured 25mm above the load platform] | ±0.4μm / ±0.4μm |
| Resolution | 50nm |
| Minimum incremental motion | 100nm |
| Straightness [Accuracy specifications measured 25mm above the load platform] | ±1.25μm / ±1.5μm |
| Flatness [Accuracy specifications measured 25mm above the load platform] | ±1.25μm / ±1.5μm |
| Pitch [Accuracy specifications measured 25mm above the load platform] | 3.9arc sec / 6arc sec |
| Roll [Accuracy specifications measured 25mm above the load platform] | 3.9arc sec / 6arc sec |
| Yaw [Accuracy specifications measured 25mm above the load platform] | 3.9arc sec / 6arc sec |
| Maximum Speed | 50mm/s |
| Load Capacity | 10kg / 5kg |
| Stage mass | 0.7kg / 0.9kg |
| Platform Mass | 2.3kg / 3.1kg |
| Material | Aluminum，7075 |
| Measurement traceability | GB_T 17421.2-2016, 5 Round Trips, ≥5Plot/L |
| Mean Time Between Failures | 23000Hours |
| Ordering Model Example | GALSA-125-P-50-M1-E1 / GALSA-125-P |
| Effective Travel - 50mm | 50mm Effective Travel |
| Effective Travel - 100mm | 100mm Effective Travel |
| Motor Option - M1 | 100W Servo Motor, Without Brake, 20-Bit Absolute Encoder |
| Motor Option - M2 | 100W Servo Motor, Brake, 20-Bit Absolute Encoder |
| Feedback Option - E1 | 1Vpp Sin/Cos Analog Output Signal &index, 20μm Grating Pitch |
| Drive motor | Servo Motor |
| Guidance type | Low-Friction Anti-Creep Crossed-Roller Guide |
| Lead Screw | Precision-Ground Ball Screw |
| Position feedback options [Optional, Closed-Loop Feedback] | Grating Encoder |
| Series Motor Brake Description [Features on This Page; Applicability of M1/M2 Configuration Options Not Confirmed] | Power-Off Brake |
| Vacuum Compatibility | Available |
Applications
Key Features
Datasheet
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Supplier Information
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