Large electron-beam evaporation optical coating equipment HCEB-2700

Large electron-beam evaporation optical coating equipment HCEB-2700

Supplier
Hcvac
Part Number
HCEB-2700
Category
Optical Coatings
Origin
China

This series was developed for mass-production market needs. Production-proven equipment offers high productivity and the lowest ownership cost for cost-optimized volume production of optical components. It can produce AR, UV/IR cutoff filters, AF, hard coatings, decorative coatings, ITO coatings, bandpass filters and HR coatings. Equipped with an electron gun, pocket-type, kidney-shaped or annular crucibles and an impedance-type evaporation source. Optical or quartz-crystal thickness monitoring enables automatic control of deposition rate and coating processes. Optional RF/Kaufman-type/Hall-type ion sources. AR coatings (substrate glass transmittance >91.5%): in the 420-680nm band, single-sided average transmittance >95% and reflectance less than 0.5% (average); double-sided average transmittance >98% and reflectance less than 0.5% (average). AS/AF coating test standards: initial contact angle 115±5°; steel-wool abrasion test using 0000# steel wool over 10*10mm, 40 strokes/min, load 1Kg: contact angle greater than 100° after 5000 reciprocating rubbing cycles; eraser test using a 6mm-diameter eraser, 25 strokes/min, load 1Kg: contact angle greater than 100° after 2500 reciprocating rubbing cycles. Note: glass test samples must be precision-polished glass specifically for touchscreen cover plates, with a clean, smooth surface.

Specification Snapshot
Load capacity [Customizable (Data for Reference Only)]
5.3 m2
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Overview

This series was developed for mass-production market needs. Production-proven equipment offers high productivity and the lowest ownership cost for cost-optimized volume production of optical components. It can produce AR, UV/IR cutoff filters, AF, hard coatings, decorative coatings, ITO coatings, bandpass filters and HR coatings. Equipped with an electron gun, pocket-type, kidney-shaped or annular crucibles and an impedance-type evaporation source. Optical or quartz-crystal thickness monitoring enables automatic control of deposition rate and coating processes. Optional RF/Kaufman-type/Hall-type ion sources. AR coatings (substrate glass transmittance >91.5%): in the 420-680nm band, single-sided average transmittance >95% and reflectance less than 0.5% (average); double-sided average transmittance >98% and reflectance less than 0.5% (average). AS/AF coating test standards: initial contact angle 115±5°; steel-wool abrasion test using 0000# steel wool over 10*10mm, 40 strokes/min, load 1Kg: contact angle greater than 100° after 5000 reciprocating rubbing cycles; eraser test using a 6mm-diameter eraser, 25 strokes/min, load 1Kg: contact angle greater than 100° after 2500 reciprocating rubbing cycles. Note: glass test samples must be precision-polished glass specifically for touchscreen cover plates, with a clean, smooth surface.

Specifications

ParameterValue
Chamber dimensions [Customizable (Data for Reference Only)]Φ2700 x H1850
Load capacity [Customizable (Data for Reference Only)]5.3 m2
Structure [Customizable (Data for Reference Only)]Vertical, front-opening door, SUS304 stainless steel
Rotational Speed [Customizable (Data for Reference Only); Variable]10~30RPM (variable)
Pumping Speed [Customizable (Data for Reference Only)]From atmospheric pressure to 2.0×10-3Pa ≤30min
Ultimate Vacuum [Customizable (Data for Reference Only)]1.0×10-4Pa
Coating material [Customizable (Data for Reference Only)]TiO2,Ti3O5,H4,ZrO2,ZnS,Al2O3,MgF2,SiO2,Au,Ag,Cu,Al,Ti,In,Sn…
Heating System [Customizable (Data for Reference Only)]Halogen lamp / sheathed heater, maximum 250℃
Applicable Wavelength [Customizable (Data for Reference Only)]380nm~780nm
AR coating - Single-sided average transmittance [Base Glass Transmittance >91.5%; Wavelength Band 420-680nm]>95%
AR coating - Single-sided reflectance [Base Glass Transmittance >91.5%; Wavelength Band 420-680nm]Less Than 0.5 (Average Value)%
AR coating - Double-sided average transmittance [Base Glass Transmittance >91.5%]>98%
AR coating - Double-sided reflectance [Base Glass Transmittance >91.5%]Less Than 0.5 (Average Value)%
AS/AF coating test standard - Initial contact-angle range [The glass test specimen must be precision-polished glass specifically for touchscreen cover plates, with a smooth surface.]115±5°
AS/AF coating test standard - Steel-wool abrasion-resistance test standard - Contact angleGreater Than 100°
AS/AF coating test standard - Eraser test standard - Contact angleGreater Than 100°

Applications

AR, AS/AF, hard coatings, decorative coatings, ITO coatings, HR coatings, etc.

Key Features

AR/AF evaporation coating; higher production capacity; lower production costs; full automation and comprehensive data logging; optical monitoring improves process repeatability. Product advantages: high throughput meets volume-production market needs; custom combinations of components suit customer requirements; simple operation and maintenance; high performance and versatility; automatic evaporation control provides a fully automated process; remote access supports factory remote diagnostics. Main configuration (HCEB-2700/HCEB-2350): fixture system: upper-center rotating umbrella rack, automatic inversion, one-piece or split; pumping system: low-vacuum pump group + high-vacuum pump group + cryopump / Polycold; vacuum control: vacuum controller, Penning and Pirani gauges; coating system: electron gun, pocket-type, kidney-shaped/annular crucibles, impedance-type evaporation source and RF/Kaufman-type/Hall-type ion sources; gas admission: MFC or APC automatic pressure controller; thickness controller: quartz-crystal or optical control; control system: PC+PLC.

Datasheet

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Supplier Information

Guangdong Huicheng Vacuum Technology Co., Ltd. is a global vacuum application solution provider, engaged in the R&D, production and sales of optical coating equipment, functional thin film coating equipment, decorative coating equipment, roll-to-roll coating equipment, automotive parts coating equipment, continuous magnetron sputtering coating production lines, ultra-high vacuum systems and other vacuum equipment, ALD atomic layer deposition equipment, semiconductor equipment, electronic production equipment, optoelectronic equipment, photovoltaic equipment, power battery equipment and related accessories. It is a national high-tech enterprise focusing on the R&D and application of equipment and product-related manufacturing processes and application technologies, control software, process control software and related production automation software, and provides technology transfer, technical consulting and technical services. The company was founded in 2006 and has hired senior experts and senior engineers in the domestic vacuum industry to specifically guide and be responsible for the R&D and design of new products. It has obtained multiple invention, design, utility model patents and copyrights, and was successfully listed on the ChiNext Board of the Shenzhen Stock Exchange in June 2024. HCVAC provides complete thin film deposition solutions for precision optics, optoelectronics, new energy, flat panel display, semiconductors, power devices, tooling and molds, aviation, automotive, mobile phones, hardware and other markets. From R&D to prototyping and mass production, with core technology combinations such as evaporation, sputtering, PECVD, and ALD, we can provide practical production recommendations, R&D services and custom engineering to meet customers' personalized needs. Focusing on cutting-edge fields such as semiconductors, new energy, 5G/6G communications, IoT sensors, and artificial intelligence (AI chip packaging/CoWoS), the company has set up four major laboratories: optical thin films, functional coatings, pan-semiconductors, and new materials. It works closely with customers to develop future equipment and processes, develops new film formation technologies through investment or cooperation, and continuously improves coating equipment.

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Large electron-beam evaporation optical coating equipment HCEB-2700
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