White-Light Interferometric Profilometer WLI 1000
The WLI 1000 white-light interferometric profiler uses objectives with different measurement magnifications and provides nanometer-level vertical resolution, suitable for measurement and analysis of smooth surfaces.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Measurement Mode [Technical specifications] | PSI/VSI/extended depth of field/brightfield |
| Single-measurement field of view [Technical specifications; 20× objective, Automatic stitching available] | 500 μm × 350 μm |
| Vertical scanning range [Technical specifications] | 0~10 mm |
| Measurable sample reflectivity [Technical specifications] | 0.1%~100% |
| Vertical resolution [Technical specifications] | <0.2 nm |
| Height measurement indication error [Technical specifications] | <0.5% |
| RMS roughness repeatability [Technical specifications] | 0.01 nm |
| Lateral Resolution [Technical specifications; @550nm, 20x objective] | 0.69 μm |
| Measurement Time [Technical specifications; PSI mode] | <5 s |
| Image Sensor [Equipment specifications] | 1920(H)×1200(V), 1920 horizontal pixels and 1200 vertical pixels |
| Brightfield objective [Equipment specifications] | 5×、10×、50×、100× |
| Interferometric objective [Equipment specifications] | 20× |
| XY stage [Equipment specifications; Travel, motorized] | 50 mm × 50 mm |
| Angular adjustment [Equipment specifications; Manual] | ±12 ° |
| Z-axis adjustment [Equipment specifications] | 20mm motorized + 75mm manual (coarse and fine adjustment mechanism) |
| Z-direction scanning range [Equipment specifications] | 10 mm |
| Vertical roughness measurement repeatability [Equipment specifications; PSI mode] | 0.2 nm |
| Step-height measurement indication error [Equipment specifications; VSI mode] | <0.5% |
| Optical Resolution [Equipment specifications; @550nm, 20× interferometric objective] | 0.69 μm |
| Measurable sample reflectivity [Equipment specifications] | 0.1%~100% |
Key Features
Datasheet
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Supplier Information
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