Two Dimensional Nano Positioning / Scanning Stage NP-ST-XY-100
Two Dimensional Nano Positioning / Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity ， Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Track scan 。 Support product development and development for different applications and needs Custom 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Number of motion axes | 2 |
| Sensor Type | Capable Sensors |
| Drive Type | Piezoelectric Ceramic |
| Closed cycle | 100 um × 100 um |
| Closed circle resolution | 0.35 nm |
| Repeatability | 1 nm |
| Airborne tuned frequency | 550 Hz |
| Maximum Load | 1 kg |
| Material | Aluminum Alloy |
| Dimensions | 120.5 mm × 120.5 mm × 20 mm |
| Self Weight | 385 g |
| Electrical Interface | D-sub9 |
| Operating Temperature | -20~80 ℃ |
| Vacuum （mbar）（ Optional ） | Super vacuum compatible. 5X10-9 |
| Fit Controller | Digital Servo Controller NPC-042/ Nano. Servo Controller APS-203 |
Applications
Key Features
Datasheet
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