Single Axis Angular Stage NHR-77.5
Single Axis Angular Stage Special 10° Within range high resolution Θ Positioning Move , Based on the principle of slimy biomolecular motion and special design Drive And nanostealing technology. , Nano-class Repeatability , Realizable Process ± 5° Pitch Adjustment of 。 The trigger is so tight. , High level of sustainability and long-term stability , It's a way to get across the scale. Nano Positioning And complex trajectories. 。 Support product development and development for different applications and needs Custom 。
Specification Snapshot
Sensor Type
Grating Sensor
Travel
±5 °
Weight
150 g
Dimensions
50 mm × 50 mm × 16.5 mm
Operating Temperature
10-50 ℃
Material
Aluminum Alloy / Titanium Alloy
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Overview
Single Axis Angular Stage Special 10° Within range high resolution Θ Positioning Move , Based on the principle of slimy biomolecular motion and special design Drive And nanostealing technology. , Nano-class Repeatability , Realizable Process ± 5° Pitch Adjustment of 。 The trigger is so tight. , High level of sustainability and long-term stability , It's a way to get across the scale. Nano Positioning And complex trajectories. 。 Support product development and development for different applications and needs Custom 。
Specifications
| Parameter | Value |
|---|---|
| Sensor Type | Grating Sensor |
| Travel | ±5 ° |
| Maximum Load | 500 g |
| Centre for Rotation ( Work Platform ) | 77.5 mm |
| Drive Type | Piezoelectric Ceramic |
| Angular Speed (°/s) | 3 |
| Minimum Step length | 0.5 μrad |
| Weight | 150 g |
| Dimensions | 50 mm × 50 mm × 16.5 mm |
| Operating Temperature | 10-50 ℃ |
| Material | Aluminum Alloy / Titanium Alloy |
| Vacuity (mBar) | Super vacuum compatible. (5X10-9 ) |
| Recommendations Controller / Driver | SS01-C2A |
Applications
Scan the mirror. (SEM) Sample Manipulation Active Optical Move the ultra-resolution image sample Wide-range electronic beams in a straight print (EBL) Weiner equipment and manufacture Integrated circuit manufacturing and detection High vacuum sample accuracy and alignment Nanofocus and scan Micro and nano CT
Key Features
A long, long exercise. :± 5° High Resolution : Closed ring resolution 1.72μrad Speed of motion : Katar 3°/s Load :500g Super-high vacuum compatibility ; Motion Mode : Support for open and closed rings LightQuantification 、 The structure is tight. , High reliability Modular design , The friction unit is replaced
Datasheet
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Supplier Information
Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions.
The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.
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