H-TM-117 High Dynamic Performance Six Degree of Freedom Platform HEXAPOD H-TM-117
High Dynamic Performance Six Degree of Freedom Platform for multi-freedom movement ， Dynamic Large range ， Carrying large stability ， Any Center to Move ， Meeting various industrial needs ， Adaptation to atmosphere and vacuum 。 Extensively applied to micro-managing 、 Biotechnology 、 Semiconductor Manufacturing etc. 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | X, Y, Z, θX, θY,θZ |
| Sensor Type | Grating Sensor |
| Drive Type | None Draw the current. |
| Closed cycle | X/Y/Z: ±16 / ±16/ ±6.5mm θX/θY/θZ: ±10°/ ±10°/ ±21° |
| Minimum Offset Incremental | X/Y/Z: 0.1 / 0.1/ 0.1μm θX/θY/θZ: 0.5/ 0.5/ 0.5 arcsec |
| Unidirectional Repeatability | X/Y/Z: ±0.25/ ±0.15/ ±0.1μm θX/θY/θZ: ±0.25/ ±0.6/ ±0.4 arcsec |
| Two-way Repeatability | X/Y/Z: ±0.4 / ±0.25/ ±0.1μm θX/θY/θZ: ±0.25/ ±0.6/ ±0.4 arcsec |
| Maximum Speed | X/Y/Z: 3 / 3/ 3 mm/s θX/θY/θZ: 1.43/ 1.43/ 1.43deg/s |
| Maximum Load Capacity ( Baseboard Horizontally ) | 5 kg |
| Maximum Load Capacity ( Baseboards in any direction ) | 1.5 kg |
| X/Y/Z Axis intensity (N/μm) | 0.7/0.7/8 |
| Material | Aluminum Alloy 、 Stainless Steel |
| Dimensions | Φ136 mm × 118 mm |
| Operating Temperature | 0~50 ℃ |
| Controller | APE-6CD |
Applications
Key Features
Datasheet
Supplier Information
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