H-TM-350 Six Degree of Freedom Positioning Stage HEXAPOD H-TM-350
Six Degree of Freedom Positioning Stage Multi-Liberal Movement ， Dynamic Large range ， Heavy Load It's stable. ， Any Center to Move ， Meeting various industrial needs ， Adaptation to atmosphere and vacuum 。 Extensively applied to micro-managing 、 Biotechnology 、 Semiconductor Manufacturing etc. 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | X, Y, Z, θX, θY,θZ |
| Sensor Type | Grating Sensor |
| Drive Type | None Draw the current. |
| Closed cycle | X/Y/Z: ±18 / ±18/ ±15mm θX/θY/θZ: ±2°/ ±2°/ ±2° |
| Bit Resolution | X/Y/Z: 0.5 / 0.5/ 0.5μm θX/θY/θZ: 3.5/ 3.5/ 3.5 μrad |
| Repeatability @200kg Load | X/Y/Z: 3 / 3/ 3 μm θX/θY/θZ: 2/ 3.5/ 2 μrad |
| Resonant Frequency | X/Y/Z: 20/ 25/ 50Hz |
| Load | 200 kg |
| Material | Aluminum Alloy 、 Stainless Steel |
| Dimensions | ⌀535×360 |
| Operating Temperature | 0~50 ℃ |
| Controller | ABE-6CD-350 |
Applications
Key Features
Datasheet
Supplier Information
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