High Stiffness Two Axis Tip/Tilt Stage NPR-PZT-UV
High Stiffness Two Axis Tip/Tilt Stage Based on Piezoelectric Ceramic Drive and High Precision Orientation Module The direction to achieve nanoscale super-high resolution. / Scan Line Movement , Realizable Process ± 1 Subtracting milligrams 。 Inline Capacitive Sensor , The structure is tight. , Excellent closed-ring control through self-developed high-performance nanoserving systems , He's got nanoscale motion resolution and motion accuracy. , And it's also high speed. 、 High Dynamic Performance Precision pointer and scan function 。 Support product development and development for different applications and needs Custom 。
Overview
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | θX,θY |
| Sensor Type | Capable Sensors |
| Closed cycle | ±1 mrad |
| Closed circle resolution | 0.5 μrad |
| Load | 1 kg |
| Drive Type | Piezoelectric Ceramic |
| Dimensions | 120 mm × 120 mm × 33 mm |
| Self Weight | 427 g |
| Material | Aluminum Alloy / Titanium Alloy |
| Operating Temperature | 10-50 ℃ |
| Recommendations Controller / Driver | Digital Servo Controller NPC-042-S1PP/ Nano. Servo Controller APS-2030101 |
Applications
Key Features
Datasheet
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Database Platform