Heavy Load Z Axis Nano Positioning / Scanning Stage NP-ST-Z-100-L
Heavy Load Z Axis Nano Positioning / Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity , Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Offset Scan function 。 Support product development and development for different applications and needs Custom 。
Specification Snapshot
Sensor Type
Capable Sensors
Resolution
1.22 nm
Resonant Frequency
66(@5kg Load )
Material
Aluminum Alloy / Titanium Alloy
Dimensions
90 mm × 36.5 mm × 90 mm
Operating Temperature
-20~80 ℃
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Overview
Heavy Load Z Axis Nano Positioning / Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity , Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Offset Scan function 。 Support product development and development for different applications and needs Custom 。
Specifications
| Parameter | Value |
|---|---|
| Number of motion axes | 1 |
| Sensor Type | Capable Sensors |
| Drive Type | Piezoelectric Ceramic |
| Closed cycle | 100 um |
| Resolution | 1.22 nm |
| Minimum Step length | 2 nm |
| Resonant Frequency | 66(@5kg Load ) |
| Maximum Load | 5 kg |
| Material | Aluminum Alloy / Titanium Alloy |
| Dimensions | 90 mm × 36.5 mm × 90 mm |
| Self Weight | 685 g |
| Electrical Interface | D-sub9 |
| Vacuity | Vacuum Compatibility 5X10⁻⁹ (mBar) Optional |
| Operating Temperature | -20~80 ℃ |
| Fit Controller | Digital Servo Controller NPC-031/ Nano. Servo Controller APS-203 |
Applications
Optical alignment. Nanoprint Microscopic Imaging / Manipulation Grating Writing Double photomeric Optical migration Wafer Test Surface detection Measuring Techniques Semiconductor Process
Key Features
Super tall. Positioning Accuracy High Dynamic Performance Multimotor Mode : Positioning / Scan It's a very high vacuum. None Equivalent chain orientation
Datasheet
Product Datasheet
PDF
Supplier Information
Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions.
The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.
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