Three Dimensional Nano Positioning / Scanning Stage NP-ST-XYZ-100
Three Dimensional Nano Positioning / Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity , Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Track scan 。
Specification Snapshot
Travel
100/X Axis ,100/Y Axis ,50/Z Axis
Repeatability
1 nm
Sensor Type
Capable sensors
Material
Aluminum Alloy
Overall Dimensions
40 mm × 40 mm × 42 mm
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Overview
Three Dimensional Nano Positioning / Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity , Closed loop control through high performance nanoserve system , is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Track scan 。
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | X,Y,Z |
| Travel | 100/X Axis ,100/Y Axis ,50/Z Axis |
| Closed circle resolution | 0.35 nm |
| Repeatability | 1 nm |
| Sensor Type | Capable sensors |
| X/Y/Z Up-board airborne balconies frequency | 600/600/550 |
| Maximum Load | 200 g |
| Operating Temperature Scope | -20~80 ℃ |
| Material | Aluminum Alloy |
| Overall Dimensions | 40 mm × 40 mm × 42 mm |
| Quality | 150 g |
| Fit Controller | Digital Servo Controller NPC-031/ Digital Servo Controller NPC-042/ Nano. Servo Controller APS-203 |
Applications
Optical alignment. Nanoprint Microscopic Imaging / Manipulation Surface detection High density storage Measuring Techniques Surface detection Semiconductor Process
Key Features
Super tall. Positioning Accuracy None Equivalent chain orientation High-speed 、 High Dynamic Performance Subnanometer Resolution Multimotor Mode : Positioning / Scan Super-high vacuum compatible.
Datasheet
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Supplier Information
Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions.
The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.
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